Parameter analysis of air-conditioning systems for high-tech cleanrooms considering climate impact

Abstract

The air-conditioning systems for high-tech cleanrooms are usually energy-intensive, due to strict temperature, humidity and particle concentration requirements. Their system performance strongly depends on the operation parameters and climate/weather conditions. But few studies have investigated such impacts for high-tech cleanrooms. Therefore, this study has quantified the impacts of operating parameters on the performance of high-tech cleanroom air-conditioning systems under different climate conditions via parametric and sensitivity analysis. A typical high-tech cleanroom located in Chinese five climate zones is selected to examine each parameter’s impact using Energyplus/Matlab platform. Results indicate that the system annual energy consumption shows nearly linear changing trends when varying the operation parameters. The outdoor air exchange rate and MAU (make-up air handling unit) outlet air temperature are the most sensitive parameters in cold zones. The studied results can help practitioners improve air-conditioning system design and operational performance for high-tech cleanrooms through carefully determining parameters with heavy impacts.