Parameter analysis of air-conditioning systems for high-tech cleanrooms considering climate impact

Authors

  • Wenxuan Zhao The Hong Kong Polytechnic University
  • Hangxin Li The Hong Kong Polytechnic University
  • Shengwei Wang The Hong Kong Polytechnic University

DOI:

https://doi.org/10.34641/clima.2022.281

Keywords:

High-tech cleanroom, Air-conditioning system, Energy performance, Climate impact, Parameter sensitivity

Abstract

The air-conditioning systems for high-tech cleanrooms are usually energy-intensive, due to strict temperature, humidity and particle concentration requirements. Their system performance strongly depends on the operation parameters and climate/weather conditions. But few studies have investigated such impacts for high-tech cleanrooms. Therefore, this study has quantified the impacts of operating parameters on the performance of high-tech cleanroom air-conditioning systems under different climate conditions via parametric and sensitivity analysis. A typical high-tech cleanroom located in Chinese five climate zones is selected to examine each parameter’s impact using Energyplus/Matlab platform. Results indicate that the system annual energy consumption shows nearly linear changing trends when varying the operation parameters. The outdoor air exchange rate and MAU (make-up air handling unit) outlet air temperature are the most sensitive parameters in cold zones. The studied results can help practitioners improve air-conditioning system design and operational performance for high-tech cleanrooms through carefully determining parameters with heavy impacts.

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Published

2022-05-20

How to Cite

Zhao, W., Li, H., & Wang , S. (2022). Parameter analysis of air-conditioning systems for high-tech cleanrooms considering climate impact. CLIMA 2022 Conference. https://doi.org/10.34641/clima.2022.281